SMM Calibration Kit

Our kits enable a precise calibration of Scanning Microwave Microscopes.

The device is made up various gold pads residing on silicon oxide steps with different heights, composed by 144 locus of 4 standards.

  • Back end metallization (Ti/Au)
  • Ebeam front end contacts metallization circular gold pads (diameter: 6μm, 4μm, 2μm, 1μm) bi layers, Ti /Au. Au makes the contact area more independent of the exact tip shape and therefore more reliable with no oxidation problem.
  • Calibration kit reported on magnetic tab

 

Substrate information

· Silicon (1-0-0) P type
· Thickness: 325-375µm
· Resistivity: 0.01-3 Ohm.cm