SMM calibration kit

 

In the framework of the FP7 VSMMART Nano Project, MC2-Technologies engineers developped, with the support of Agilent Technologies, an innovative capacitance standard to enable calibrated scanning microwave microscopy measurement.
The device is made up various gold pads residing on silicon oxide steps with different heights, composed by 144 locus of 4 standards.

For more information, the Metal-oxide-semiconductor capacitors and Schottky diodes studied with scanning microwave microscopy at 18 GHz publication is available here.

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3D view
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Capacitance sample as seen in SMM mode.

Image from Agilent Technologies : http://www.home.agilent.com/agilent/home.jspx?cc=FR&lc=fre

3D view of the capacitance standard.

Image from AFM.

Image from Agilent Technologies : http://www.home.agilent.com/agilent/home.jspx?cc=FR&lc=fre

Drawing

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Legend

Diameters

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SiO2 Thickness

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Substrate information

· Silicon (1-0-0) P type
· Thickness: 325-375µm
· Resistivity: 1-3 Ohm.cm
Standard dimensions

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